Graphical user interface for compliance monitoring in semiconductor wafer fabrication and method of operation

ABSTRACT

A system and method is disclosed for allocating multi-function resources among a plurality of tasks within a process system in semiconductor wafer fabrication. A resource allocator allocates multi-function resources among tasks within a process system that executes at least one application process. The resource allocator comprises a monitoring controller, model of the process system, a resource allocation controller, and a compliance-monitoring viewer. The compliance-monitoring viewer is operable to display process system information to illustrate plan compliance, information visualized over a time period of years, months, days, hours, seconds, microseconds or the like.

This application is a continuation of prior U.S. patent application Ser.No. 10/463,830 filed on Jun. 16, 2003 now U.S. Pat. No. 6,957,114, whichis a continuation-in-part of 10/299,949 filed Nov. 19, 2002 now U.S.Pat. No. 6,957,113, which claims benefit of 60/408,817 filed Sep. 6,2002.

PRIORITY CLAIM TO PRIOR PATENT APPLICATIONS

This patent application claims priority as a continuation in part patentapplication to:

-   -   U.S. patent application Ser. No. 10/299,949 filed on Nov. 19,        2002, which claims priority to U.S. Provisional Patent        Application No. 60/408,817 filed on Sep. 6, 2002;    -   U.S. patent application Ser. No. 10/447,324 filed May 28, 2003,        which claims priority to U.S. patent application Ser. No.        10/299,949 filed on Nov. 19, 2002, which claims priority to U.S.        Provisional Patent Application No. 60/408,817 filed on Sep. 6,        2002; and    -   U.S. patent application Ser. No. 10/447,211, filed May 28, 2003,        which claims priority to U.S. patent application Ser. No.        10/299,949 filed on Nov. 19, 2002, which claims priority to U.S.        Provisional Patent Application No. 60/408,817 filed on Sep. 6,        2002.        Each of the above-identified patent applications is commonly        assigned to the assignee of the present invention. The        disclosures in these related patent applications are hereby        incorporated by reference for all purposes as if fully set forth        herein.

TECHNICAL FIELD OF THE INVENTION

The present invention is directed generally to resource allocationsystems and process control systems and, more specifically, to graphicaluser interfaces for compliance monitoring in semiconductor waferfabrication and related methods of operation.

BACKGROUND OF THE INVENTION

Allocation of multi-function resources within resource allocation andprocess control systems may be thought of as the management (i.e.,administration, command, control, direction, governance, monitoring,regulation, etc.) of such multi-function resources (e.g., manufacturingtools, instruments, hardware, software, databases,communication/connectivity resources, transportation resources,facilities, utilities, inventories, etc.) among a variety of taskswithin a process system.

Process systems may be arranged and implemented to manage largefacilities, such as a manufacturing plant, a semiconductor fabricationfacility, a mineral or crude oil refinery, or the like, as well asrelatively smaller facilities, such as a corporate communicationsnetwork, a data repository and management system, or the like. Suchsystems may be distributed or not, and typically include numerousmodules tailored to manage various associated processes, whereinconventional means link these modules together to produce thedistributed nature of the process system. This affords increasedperformance and a capability to expand or reduce the process system tosatisfy changing needs.

Process systems are developed and tailored to satisfy wide ranges ofprocess requirements, whether local, global or otherwise, and regardlessof facility type. Such developers and users of such systems commonlyhave two principal objectives, to:

-   -   (i) centralize management/control of as many sub-processes or        processes as possible to improve overall efficiency, and    -   (ii) support a common interface that communicates data among        various modules managing/controlling or monitoring the        processes, and also with any such centralized controller.

Each process, or group of associated sub-processes or processes, hascertain input (e.g., data, diagnostics, feed, flow, power, etc.) andoutput (e.g., data, pressure, temperature, utilization parameters, etc.)characteristics associated therewith. These characteristics aremeasurable, and may be represented in a discernable manner.

Predictive control methodologies/techniques may be used to optimizecertain processes as a function of such characteristics. Predictivecontrol techniques may use algorithmic representations to estimatecharacteristic values (represented as parameters, variables, etc.)associated with them that can be used to better manage such processresources among a plurality of tasks.

Such optimization efforts only account mathematically for the tasksbeing performed and the process resources then used to resolve the samebased upon statistical characteristics only, thereby failing to modeland factor into the optimization effort both status and logistical data,as well as to account for human capabilities and interaction (i.e.,functions, skills, qualifications, task preferences, track records andthe like) that ultimately utilize the process resources to resolve thetasks.

Conventional approaches can exhibit poor response to constantly changingor exigent circumstances, and as such fail to cooperatively optimizeprocess resources, particularly process resources capable of performingmultiple functions. What is needed in the art is a powerful and flexiblemeans for dynamically analyzing and modifying process status in areal-time mode through allocation and reallocation of multifunctionprocess resources among a plurality of tasks within a process system.

Using semiconductor fabrication as an example, in order to provideshortest cycle times, highest quality, timely-delivered cost-effectiveproducts that meet revenue growth plans, there is a continuous need toimprove manufacturing processes and sub-processes, including the contentand methods of delivering information to the operations staff.

Information about manufacturing tools and work in process (“WIP”)inventory are critical to the decision making process necessary tooperate a semiconductor wafer manufacturing line. With complexmulti-tool, multi-technology, multi-product resources (“multi-functionresources”), a need exists in the industry for a system and method thatallocate such multi-function resources among a plurality of tasks withinfabrication facility so as to execute a flexible process or plan thatresponds to WIP mix, resource availability changes, associate workschedule, skill sets (e.g., “queue-jumping” hot lots, special workrequests, etc.), and the like to meet the requirements of a“just-in-time” environment.

Stated more broadly, a measurement of process efficiency can be definedby how quickly demands by requesting tasks are satisfied through theallocation of process resources. Today, even though human operatorsassist in the allocation of resources to requesting tasks, decisions toallocate such resources are controlled by management (whether humanmanagement based upon periodic reports (e.g., daily, weekly, monthly or,even, quarterly), or automated management based upon periodic batcheddata, or some combination of the two) which reacts or decides based uponrelatively stale data, rather than reacting/deciding dynamically.

To that end, the ability to follow up on resource, as well as shift,sub-shift and individual (whether relative to a given resource orotherwise), performance is critical to the development of any planningsystem (or related cycle) that operates to maximize efficiencies in a“just-in-time” environment, such as a manufacturing area. Choices madeduring the planning cycle impact the overall productivity andeffectiveness of tool resources (e.g., furnaces, etc.).

Therefore, a need exists for a system and method for efficientlyallocating multi-function resources for a system process insemiconductor wafer fabrication. A further need exists for a processsystem and related graphical user interface (“GUI”) through whichmanagement reacts timely relative to conventional systems based upondynamic data. In particular, a need exists for GUIs, particularly,compliance-monitoring viewers, for association with systems forallocating multi-function resources in semiconductor wafer fabrication.

SUMMARY OF THE INVENTION

To address the above-discussed deficiencies of the prior art, it is aprimary object of the present invention to provide systems, as well asmethods of operating the same, for delivering graphical user interfaces(“GUIs”), particularly, compliance-monitoring viewers, for associationwith systems that allocate multi-function resources among a plurality oftasks in semiconductor wafer fabrication.

The compliance-monitoring viewer of the present invention enablesmanagement to measure plan effectiveness, for example, a plan used inthe diffusion area where multi-function resources that have varyingcapabilities are used to produce product. Compliance-monitoring viewers,and related methods, produce graphs, tables, summaries and the like atindividual tool, tool operator, shift, or other levels to enableplan-compliance review, including over a sliding-time horizon.

Broadly, such systems and methodologies enable real-time processautomation through mathematical modeling of multi-function processresources (e.g., manufacturing tools, hardware, software, databases,communication/connectivity resources, transportation resources,facilities, utilities, inventories, etc.), and then allocating ones ofsuch resources to perform various tasks within the process system,commonly in accord with at least one application process. It should benoted that such systems and methodologies may be suitably arranged tomaintain a knowledge database and to modify the same to record pastexperiences, thereby enabling the same to be self-learning.

In accord with the principles of the present invention, an exemplaryresource allocator is introduced that allocates such multi-functionresources among a plurality of tasks within the process system executingthe at least one application process. This resource allocator comprisesa monitoring controller, a model of the process system and a resourceallocation controller. An exemplary compliance-monitoring viewer isassociated with the resource allocator, though in alternate embodiments,may be associated with the system in any suitable manner.

An exemplary monitoring controller monitors measurable characteristicsassociated with the executing application process, multi-functionresources and related tasks, each of the measurable characteristicsbeing one of a status characteristic and a logistical characteristic. Anexemplary model represents mathematically the multi-function resourcesand the tasks, and defines relationships among related ones thereof as afunction of the application process (e.g., one or more applicationprocesses, resources, tasks, etc.). An exemplary resource allocationcontroller operates the model in response to the monitored measurablecharacteristics and allocates ones of the multi-function resources amongones of the tasks within the process system to efficiently execute theat least one application process.

The suitably arranged compliance-monitoring viewer, or, more generally,GUI, may illustratively be associated with the process system via theresource allocator. The compliance-monitoring viewer is operable totransform real-time process system information into a multimedia formatto enable supervisory interaction. The supervisory interaction may befrom human management, from system management (self-learning orotherwise), or from some suitable combination of human management andsystem management.

In one advantageous embodiment, the GUI provides information for thesimultaneous graphical display of real-time tool-resource data withlogistical data. Query functions may utilize a command line option toperform customized query filters based on the unique implementation ofscripts, making the exemplary embodiment “tool centered” as opposed to“inventory centered”.

An advantageous embodiment for the present invention is a resourceallocator for use in a diffusion process. For instance, a diffusionprocess in semiconductor wafer fabrication may be described as a processof depositing a dopant material onto a silicone substrate and diffusingthe dopant material into the silicone substrate via thermal agitation(the diffusion process is preferably capable of executing a plurality ofdiffusion process plans).

An exemplary resource allocator operates to allocate a plurality ofmulti-function resources, or tools (e.g., furnaces (high temperatureatmospheric pressure, low pressure chemical vapor deposition, doping(bbr3, pocl3, etc.), anneal, alloy, curing; etc.); wet chemical processstations (self contained, open bath, etc.); work in process controllers(stockers, transport modules, etc.); people (equipment loaders,operators, repair technicians, etc.), among a plurality of tasks of anygiven diffusion process plan. The resource allocator comprises amonitoring controller, a model and resource allocation controller.

During the diffusion process, meaning before, during and betweenexecution of various diffusion process plans, the resource allocationcontroller operates to modify ones of the mathematical representationsin response to the status or logistical characteristic data. In arelated embodiment, the resource allocator comprises a data repositoryhaving at least a knowledge database, and the resource allocator furtheroperates to modify the knowledge database in response to changes to orthe condition/value of the status and logistical characteristic data tothereby enable the resource allocator to be self-learning.

Before undertaking a Detailed Description of the Invention, it may beadvantageous to set forth a definition of certain words and phrases usedthroughout this patent document: the terms “include” and “comprise,” aswell as derivatives thereof, mean inclusion without limitation; the term“or,” is inclusive, meaning and/or; the phrases “associated with” and“associated therewith,” as well as derivatives thereof, may mean toinclude, be included within, interconnect with, contain, be containedwithin, connect to or with, coupled to or with, be communicable with,cooperate with, interleave, juxtapose, be proximate to, be bound to orwith, have, have a property of, or the like; the term “memory” means anystorage device, combination of storage devices, or part thereof whethercentralized or distributed, whether locally or remotely; and the terms“controller,” “processor” and “allocator” mean any device, system orpart thereof that controls at least one operation, such a device, systemor part thereof may be implemented in hardware, firmware or software, orsome combination of at least two of the same.

It should be noted that the functionality associated with any particularcontroller or allocator may be centralized or distributed, whetherlocally or remotely. In particular, a controller or allocator maycomprise one or more data processors, and associated input/outputdevices and memory that execute one or more application programs and/oran operating system program.

Additional definitions for certain words and phrases are providedthroughout this patent document, those of ordinary skill in the artshould understand that in many, if not most instances, such definitionsapply to prior uses, as well as future uses, of such defined words andphrases.

The foregoing has outlined rather broadly the features and technicaladvantages of the present invention so that those skilled in the art maybetter understand the detailed description of the invention thatfollows. Additional features and advantages of the invention will bedescribed hereinafter that form the subject of the claims of theinvention. Those skilled in the art should appreciate that they mayreadily use the conception and the specific embodiment disclosed as abasis for modifying or designing other structures for carrying out thesame purposes of the present invention. Those skilled in the art shouldalso realize that such equivalent constructions do not depart from thespirit and scope of the invention in its broadest form.

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the present invention, and theadvantages thereof, reference is made to the following descriptionstaken in conjunction with the accompanying drawings, wherein likenumbers designate like objects, and in which:

FIG. 1 illustrates an exemplary process system and associated resourceallocator in accordance with the principles of the present invention.;

FIG. 2A illustrates a graphical user interface (“GUI”) in accord withthe principles of the present invention for use in a semiconductor waferfabrication;

FIG. 2B illustrates an icon from the GUI of FIG. 2A that represents oneof a plurality of multi-function resources in accord with the principlesof the present invention for use in a semiconductor wafer fabrication;

FIG. 3 illustrates a block diagram of a process system implemented as aninformation management system associated with the resource allocator ofFIG. 1, all in accordance with the principles of the present invention;

FIG. 4 illustrates a block diagram of a network infrastructure utilizedto implement a distributed embodiment of the process system of FIGS. 1and 3 in association with a centralized implementation of resourceallocator, all in accordance with the principles of the presentinvention;

FIG. 5 illustrates a flow diagram of an exemplary method of operatingthe process system of FIGS. 1 to 4 in accordance with the principles ofthe present invention;

FIG. 6 illustrates a conceptual block diagram of an exemplary embodimentof a resource allocator for use in a diffusion process in semiconductorwafer fabrication according to one embodiment of the present invention;

FIG. 7A illustrates an exemplary graphical display of informationprovided by a compliance-monitoring viewer of the present inventionillustratively associated with a resource allocator in semiconductorwafer fabrication;

FIG. 7B illustrates an exemplary graphical display of a subset ofinformation provided by the compliance-monitoring viewer of the presentinvention as shown in FIG. 7A;

FIG. 8 illustrates an exemplary display of information provided by anEXCEL spreadsheet that is associated with the compliance-monitoringviewers of the present invention as shown in FIGS. 7A and 7B; and

FIG. 9 illustrates an exemplary resource allocator associated with thecompliance-monitoring viewer of FIGS. 7A and 7B in accordance with theprinciples of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

FIGS. 1 through 9, discussed below, and the various embodiments used todescribe the principles of the present invention in this patentdocument, are by way of illustration only and should not be construed inany way to limit the scope of the invention. Those skilled in the artwill understand that the principles of the present invention may beimplemented in any suitably arranged system, as well as method ofoperating the same, for allocating a plurality of resources, bothprocess and human resources, among a plurality of tasks within a processsystem.

Turning initially to FIG. 1, illustrated is an exemplary process system(generally designated 100), which includes a plurality of applicationprocesses 105. For purposes hereof, “application process” is definedbroadly as a program or a part of a program that can execute, whetherindependently of other parts or not, and is designed for or to meet theneeds of the process system 100. An application process may suitablyconsist of low-, mid- or high-level programs or parts thereof thatinteract with process system 100 that is associated with a resourceallocator (generally designated 110), all in accordance with theprinciples of the present invention. For purposes hereof, the phrase“process system” means any computer processing system, network ofcomputer processing systems, or portion thereof that is operable tomonitor, control or otherwise supervise a process (e.g., informationmanagement system, manufacturing plant (e.g., semiconductorfabrication), refinery, hotel, restaurant, traffic control,transportation control, emergency services (e.g., police, fire, medical,military, etc.), and the like).

According to one advantageous embodiment hereof, process system 100 is asemiconductor fabrication facility that is operable to handle multipleand varied application processes, or plans, associated with complexmulti-function resources (e.g., tools (including varying technologies))and tasks to manufacture multiple and widely varying semiconductorproducts. System 100 may, in whole or in part, be a network-based,real-time, visualized, intelligent (i.e., self-learning) system, andinclude control enhancements for industries, whether manufacturing orotherwise, that require timely delivery of services, products or otherresources. Such visualization may be over a time period of one or moreyears, months, days, hours, seconds, microseconds or other measurabletime period.

Exemplary resource allocator 110 is operable to allocate a plurality ofmulti-function resources 115 among a plurality of tasks 120 withinprocess system 100, wherein, for purposes of illustration, exemplarymulti-function resources 115 may suitably be any tool, device or othersystem used in the manufacture process of semiconductor products.According to one advantageous embodiment hereof, resource allocator 110is a general processor that is operable to accept variable servicerequests and to intelligently apply the required resource(s) to addresssuch requests. Resource allocator 110 illustratively includes a memory125, a monitoring controller 130, and a resource allocation controller135. Resource allocator 110 is associated with a graphical userinterface (“GUI”) 140. GUI 140 provides graphical information controls(discussed with reference to FIGS. 2A and 2B) that cooperatively offerenhancements of real-time, visual, intelligent, and control functions,possibly through web-base connectivity.

Exemplary memory 125 is operable to store a model 145 of process system100. Exemplary model 145 mathematically represents application processes105, multi-function resources 115, and tasks 120, and also definesvarious relationships among related ones of application processes 105,multi-function resources 115, and tasks 120. According to oneadvantageous embodiment hereof, memory 125 includes a plurality ofdatabases (shown in FIG. 3) used, for instance, for service/function,control and knowledge.

A service/function database may be operable to store informationregarding customers, networks, transactions, resources, communicationsor the like. A control database may be operable to store algorithms,rules, key elements for decision-making or the like. A knowledgedatabase may be operable to provide task related intelligent informationto help make optimal decisions, and to acquire and accumulate experiencethrough evaluating results (i.e., artificial intelligence, expert systemanalysis, neural networks, etc.).

Exemplary monitoring controller 130 is operable to monitor measurablecharacteristics associated with ones of application processes 105,multi-function resources 115, and tasks 120. According to oneadvantageous embodiment hereof, monitoring controller 130 is a real-timemonitor of updated status or logistical data of resources and tasks, andenables human interaction online with other subsystems, allowing a humaninterface to respond to, modify, update or over-ride the automateddecision-making processes. Each of the measurable characteristics is oneof a status characteristic or a logistical characteristic.

Exemplary resource allocation controller 135 is responsive to ones ofthe monitored measurable characteristics and may be operable to: (i)operate the model; (ii) modify ones of the mathematical representationsof application processes 105, multi-function resources 115, tasks 120,and the defined relationships among related ones of applicationprocesses 105, multi-function resources 115, and tasks 120; and (iii)allocate ones of resources 115 among ones of tasks 120 within processsystem 100.

According to one advantageous embodiment hereof, broadly, resourceallocation controller 135 allocates ones of multi-function resources 115among ones of tasks 120 within process system 100 in response to themonitored measurable characteristics to efficiently execute one or moreapplication processes 105, and, more specifically, operates to interactwith available resources and tasks to generate and manage the requiredtransactions within one or more application processes 105 (noting, forinstance, that measurable characteristics of resource allocationcontroller 135 may be associated with management of customers, networks,resources, and communications, such as service objectives, metrics, andmeasurements).

Exemplary GUI 140 is a user interface that is operable to transformreal-time process system information into an audio or visual format toenable supervisory interaction. According to one advantageous embodimenthereof, GUI 140 is operable to visualize the data and status ofresources, requests as well as on-going transactions by using graphicdisplays, multimedia equipment to provide real-time data as well ashistorical and statistical information with human interaction.

It is a primary object of the present invention to provide systems, aswell as methods of operating the same, for delivering GUIs,particularly, compliance-monitoring viewers, for association withsystems that allocate multi-function resources among a plurality oftasks, for instance, in semiconductor wafer fabrication. Acompliance-monitoring viewer hereof enables management to measure planeffectiveness, for example, a plan used in the diffusion area wheremulti-function resources that have varying capabilities are used toproduce product. The compliance-monitoring viewer, and relatedmethodology, produce graphs, tables, summaries and the like atindividual tool, tool operator, shift, or other levels to enableplan-compliance review, including over a sliding-time horizon.

Turning to FIG. 2A illustrated is an exemplary GUI 140 in accord withthe principles of the present invention for use in a semiconductor waferfabrication. GUI 140 includes a plurality of icons 200 representing aplurality of multi-function resources 115. In wafer fabrication, themission is to provide the shortest cycle time, highest quality, costeffective products on time to continually meet revenue growth plans.This causes an on-going need to continuously improve manufacturingprocesses including the content and methods of delivering information toan operations staff.

Status information about the manufacturing tools and work in processinventory are often critical to making decisions needed to successfullyoperate a wafer manufacturing line on a daily basis. In executing anapplication process, or plan, it is critical to know what is plannednext. This is a time-consuming communication exercise. These plans maybe flexible in responding to WIP mix, tool availability changes,associated work schedules and skill sets. A “just in time” environmentis responsive to “queue jumping hot lots”, or “Static WIP” as well asspecial work requests for certain portions of lots that make theplanning process more difficult. Being able to project output by the“end of business” makes for its own special status requirements whenattempting to measure turns and operational outputs.

Real-time information is preferred to updated batch reporting, and whencombined with GUI 140 interface, operational staff productivityincreases significantly. In one implementation, resource, or tool-level,status data is updated automatically every minute while the logisticalinformation is updated every other minute. The exemplary running wheelicon is easily contrasted between “on” and “off” (or static) used todisplay an “idle” furnace making for quick interpretation.

According to this implementation, status data changes as the tool,itself progresses through process sub-steps, and is sensed from thesensors, timers, controllers (e.g., mass flow controllers,thermocouples, countdown buffers, etc.), etc. Status data may suitablybe modified by one resource or tool at a time and changes in logisticaldata do not directly cause a change in status data. Logistical data istypically digital in nature and arguably comprehends conditions notresiding on the resource or tool itself (e.g., number of lots, operatoridentification; plan state, etc.) The logistical data of a group ofresources or tools may change based on a status change of any oneresource or tool, a task, an application process, a lot of material, orthe like.

Many resources, such as furnaces, for example, can be sub-divided intosmaller logical workgroups arrangements or into process focus areagroups (e.g., clean oxidation). An exemplary display for each tube'sinformation is a combination of tool and logistical level data in astandardized format that includes:

-   -   tool name, tool focus area assignment, idle or running, up or        down, ownership (e.g., Prod, Eng, Mnt), process running        including the sub-routine level, time remaining, time of        completion, number of wafers in process, number of wafers        available to process, number of wafers in next application        process (or plan), next process planned, originator of next        application process, rank of next application process in        relation to dispatching system.

Turning to FIG. 2B, illustrated is an exemplary icon that represents oneof a plurality of multi-function resources 115 in accord with theprinciples of the present invention for use in a semiconductor waferfabrication. Additional features include special symbols that appear ifthe tool develops an equipment error condition, as this may cause a needfor a modification of a loading plan, as an example. Buttons enablequeries of the factory logistical data including qualificationschedules, last “X” hour history, whole area WIP (e.g., running, readyto load, ready to pre-clean, etc.), application processes for othertools including the unload schedules for work currently in process.Button bars may also include launch points for viewing either thecurrent run data itself or in combination with historical runs of thisor any other furnace, according to this example.

Turning next to FIGS. 3 and 4, introduced is an information managementsystem embodiment of process system 100 of FIG. 1. The exemplaryinformation management system embodiment of process system 100 isintroduced by way of illustration only to describe the principles of thepresent invention and should not be construed in any way to limit thescope of the invention. Illustrated is a conceptual block diagram ofprocess system 100 associated with a service operation resourceallocator 110, all in accordance with the principles of the presentinvention. Exemplary process system 100, in addition to serviceoperation resource allocator 110, also includes a plurality ofapplication processes 105, namely, a service customer block, and aservice management block.

Exemplary service customer block may be a person or a controller; forinstance, service customer block may suitably be a person using acomputer that is associated with an intranet or the Internet, or it maybe an intelligent input/output device associated with equipment to sendand receive data using connectivity.

Exemplary service management block includes a plurality of GUIs 140 thatprovide user interfaces operable to transform real-time information intoan audio or visual format to enable supervisory interaction. Servicemanagement block is operable to enable supervisory interaction withflexibility to visualize and control the entire service process flexibly(in a related embodiment, such supervisory interaction may suitably bein detail or in general with zoom in/out functions in a real-time mode).

Exemplary resource allocator 110 is a resource allocator that isoperable to allocate a plurality of service resources 115 among aplurality of tasks 120 within process system 100. Service resources 115include multifunction resources, which may include definitions of humanresources based upon services, functions, activities, skills,qualifications, task preferences, track records and the like. Exemplaryhuman resources may include service staff that work with customers orservice requests, such as waiters, mechanics, plumbers, painters,electricians, soldiers, technicians, engineers, etc. Exemplary humanresources may also include service coordinators, system operators andadministrators that support the operations, such as accountants,purchase agents, auditors, receptionists, secretaries, controllers,servicemen, network administrators, etc. Exemplary human resources mayalso include service managers, system managers, and operation managersthat manage the process system and make business and operationsdecisions, such as information technology (“IT”) managers, policechiefs, hotel managers, restaurant managers, store managers, officers,executives, etc.

The process resources may suitably be classified into eight categories,namely, tools, hardware, software, databases, communication/connectivityresources, transportation resources, facilities, utilities, andinventories. Exemplary hardware resources include computers, networkdevices such as switches/routers/hubs, digital/analog sensors, cables,meters, monitors, scopes, audio/video devices, special service tools,etc. Exemplary software resources include operation systems, networksystems, database systems, application programs, graphics interfaces,system utilities, special applications such as artificial intelligence,neural net, system control and data acquisition, etc.

Exemplary data resources include three databases, namely, (i) servicedatabases 210 that maintain service objects (customers/equipment),service transactions, networks, resources, and communications, (ii)control databases 220 that maintain key attributes, algorithms,instructions, mathematics and rules that manage, monitor and control theoperations, and (iii) knowledge databases 225 that maintain on-goingreal-time knowledge, information and experiences compiling for resourceretention and self-learning process.

Exemplary communication/connectivity resources include local-area andwide-area networks, Internet, telephones/facsimile, mail, etc. Exemplarytransportation resources include trucks, cars, boats, airplanes, bikes,motorcycles, railroads, space shuttles, balloons, military vehicles,all-terrain vehicles, satellites, etc. Exemplary technology resourcesinclude service automation technology that combines major technologyareas, namely, (i) network technologies in office automation, (ii) humanmachine interface (“HMI”) technologies in industrial automation, and(iii) artificial intelligent technologies. Exemplary facilitiesresources include computer control/monitor/server rooms, labs,workrooms, offices, towers/antenna, machines/tools, piping, etc.Exemplary utilities resources include electricity, water, fuel, air,chemicals, automated warehousing, distribution systems/gatheringsystems, etc. Exemplary inventory resources include supplies, materials,peripherals, components, ammunition, etc.

An important aspect of the illustrated embodiment is that resourceallocator 110 provides systematic operation with automatic andresponsive control of service activities based on real-time service dataand built-in intelligent decisions from model 145 of FIG. 1. Routinedecisions are made by service automation while service operations areongoing. The management is able, via GUIs 140, to make responsivedecisions and allocate or utilize service intelligently based on thereal-time graphics-enhanced information.

Again, a primary object of the present invention is providing systems,and related methodologies, for delivering compliance-monitoring viewersfor association with systems that allocate resources among a pluralityof tasks. A compliance-monitoring viewer hereof enables management tomeasure service plan effectiveness, for example, a plan used in theprovision of services as described here above where multi-functionservice resources having varying capabilities are used to provideservices. Compliance-monitoring viewers, and related methods, producegraphs, tables, summaries and the like at individual service resources,resource providers, shifts, or other monitoring levels to enableservice-plan-compliance review, including over a sliding-time horizon.

Resource allocator 110 is illustratively associated with a plurality ofservice resources 115 and a plurality of service controls 205. Exemplaryservice resources 115 may suitably include tools, hardware, software,information or facilities, all of which are to be applied to serviceactivities. Exemplary service controls 205 may suitably includemonitoring controller 130, resource allocation controller 135, and model145, all of FIG. 1, that work cooperatively to automatically issueservice instructions according to defined rules of model 145.

Service control 205 therefore monitors and controls the service resourceallocation and utilization as well as service level and matrix for theservice operation. Model 145 of service control 205 again mathematicallyrepresents application processes 105, service resources 115, and tasks120, and also defines various relationships among related ones of thesame, and includes a service database 210, a control database 220 andknowledge database 225. Any suitably arranged mathematicalrepresentation may be used for model 145 or, for that matter, any of themeasurable characteristics. Those skilled in the art will readilyrecognize that such mathematical representations will often beapplication dependent. Such measurable characteristics may be eitherstatus characteristics or logistical characteristics, and are used toexecute model 145 to efficiently allocate resources.

Exemplary service database 210 is operable to store real-timeinformation regarding service customers 105 and service activities.Service database 210 provides information of service activities toservice resources 115 through a plurality of service queues. Servicedatabase 210 also feeds real-time information to control database 220.According to the present embodiment, service database 210 may suitablybe a relational database with flat file structure containing data in atwo-dimensional table format. Exemplary control database 220 is operableto store consolidated real-time key attributes of information fromservice database 210 and also stores pre-defined algorithms(instructions and rules associated with monitoring controller 130 andresource allocation controller 135). Instructions can be automaticallyexecuted according to the rules and real-time key attributes. Servicecontrol 205 works with control database 220 to carry out definedinstructions. According to the present embodiment, control database 220is a data file with special format that contains key data and algorithms(instructions and rules associated with monitoring controller 130 andresource allocation controller 135).

Exemplary knowledge database 225 is operable as a central repository ofqualitative and quantitative information to develop standards ofperformance in activities that are common regardless of industry.Knowledge data that would serve as a reference point for performance andprocedural improvement to provide task related intelligent informationused to make decisions optimally, and to acquire and accumulateexperience through evaluating results (i.e., artificial intelligence,expert system analysis, neural networks, etc.).

An important aspect of the illustrated embodiment is that controldatabase 220 serves to provide information service management withmultimedia, and control enhancements based on real-time information. Insummary, using service database 210, control database 220 and knowledgedatabase 225, resource allocator 110 is operable to allocate a pluralityof multifunction service resources 115 among a plurality of tasks 120within process system 100.

Turning now to FIG. 4, illustrated is a conceptual block diagram of anexemplary network infrastructure utilized to implement a distributedembodiment of process system 100 in association with a centralizedimplementation of service operation resource allocator 110. Exemplarydistributed process system 100 includes a plurality of applicationprocesses 105, including LAN users 300, intelligent devices 305 (e.g.,personal data assistants (“PDAs”), two-way messaging devices, etc.), WANusers 310, Internet users 315, and the like. Those of ordinary skill inthe art will recognize that this embodiment and other functionallyequivalent embodiments may suitably be implemented by a variety ofmethods using many different computer, or processing, system platforms.Conventional computer and processing system architecture is more fullydiscussed in Computer Organization and Architecture, by WilliamStallings, MacMillan Publishing Co. (3^(rd) ed. 1993); conventionalprocessing system network design is more fully discussed in Data NetworkDesign, by Darren L. Spohn, McGraw-Hill, Inc. (1993); and conventionaldata communications is more fully discussed in Data CommunicationsPrinciples, by R. D. Gitlin, J. F. Hayes and S. B. Weinstein, PlenumPress (1992) and in The Irwin Handbook of Telecommunications, by JamesHarry Green, Irwin Professional Publishing (2^(nd) ed. 1992). Each ofthe foregoing publications is incorporated herein by reference for allpurposes.

Broadly, process system 100 allocates a plurality of multifunctionresources among a plurality of tasks thereby enabling real-time processautomation through mathematical modeling of the process resources 115and tasks 120, and then allocating ones of such resources 115 to performvarious tasks 120 within the process system 100. For the purposes of theillustrated embodiment of FIG. 4, tasks are divided into threecategories, namely, service requests, service dispatches and informationsharing. A service request may suitably be stored in service databases210 with priority, location, contents, requirements, contacts, etc. Aservice dispatch may suitably be stored in control databases 220 andknowledge databases 225 with service level objectives, servicemetrics/measurements, transaction/actions, status and situations,decision-making processes with real-time responsive, pre-defined,programmed, intelligent, knowledge/experience retention andself-learning characters. Information sharing is a request for computergenerated audio/video and print report, e-based, real-time,graphical/visualized, etc.

Turning next to FIG. 5, illustrated is a flow diagram (generallydesignated 500) of an exemplary method of operating process system 100of FIGS. 1 to 4, all in accord with the principles of the presentinvention. For purposes of illustration, concurrent reference is made toembodiment disclosed with reference to FIG. 1. It is beneficial toassume that process system 100 is instantiated and fully operational,and for illustrative purposes directed to a raw material refiningenvironment. Further, for simplicity, assume that there are a plethoraof multi-function resources, including human resources. Thus, exemplaryprocess system 100 controls processing raw materials, and likelycontrols a control center and associated process stages (not shown;e.g., application processes 105).

A first resource 115 might include raw material grinders that receive afeed of raw material and grind the same, such as by using a pulverizeror a grinding wheel, into smaller particles of raw material. A secondresource 115 might include a washer that receives the ground rawmaterials and cleans the same to remove residue from the first stage. Athird resource 115 might include separators that receive the ground,washed raw materials and separate the same into desired minerals and anyremaining raw materials. Since this process system and related facilityare provided for purposes of illustration only and the principles ofsuch a facility are well known, further discussion of the same is beyondthe scope of this patent document and unnecessary.

To begin, resource allocator 110 stores a model 145 of process system100 in memory (process step 505). Model 145 mathematically representsmultifunction resources 115, the process resources, the applicationprocesses 105 (i.e., the control for the grinders, separators andwashers, etc.), and relationships among related ones thereof. Resourceallocator 110 then monitors these measurable characteristics andreceives service requests (process step 510), and, for the presentexample, from a particular grinder. The measurable characteristics maybe status or logistical.

In response to measurable characteristics causing a request for serviceof the subject grinder, resource allocator 110 evaluates the alternateresources available and allocates one to provide the same function,along with process resources that may be necessary and appropriate tocomplete the same (process step 515). Resource allocator 110, inresponse to the servicing of the task, modifies ones of the mathematicalrepresentations, first indicating that the resource is occupied andpossibly indicating the quality with which the task was completed(process step 520).

According to the illustrated embodiment, resource allocator 110 modifiesknowledge database 225 to provide updated task related information tohelp make future decisions concerning the grinder, the allocatedalternative grinder, and possibly any human resource used to service thesame, etc., both intelligently and optimally. Resource allocator 110thereby acquires and accumulates experience through evaluating results(i.e., artificial intelligence, expert system analysis, neural networkanalysis, etc.). Thus, in a later scenario, should this samemultifunction resource 115 be otherwise occupied with another task andthis grinder requires a similar service, resource allocator 110 cansuitably utilize dynamic knowledge database 225 evaluate availableresources 115 to decide whether to reallocate this same grinder resource115 to the task based upon past experience recorded in the associatedmeasurable characteristics or to allocate another resource to the taskleft uncompleted. Again, multifunction resources, both process andhuman, are re-usable, re-directable for “next” requests throughintelligent decision making sub-process of experience accumulation,analysis, optimization and self-learning. Knowledge database 225operates as a central repository of knowledge data, capturingqualitative and quantitative information to develop standards ofperformance in activities that are common regardless of industry.

According to this embodiment, a compliance-monitoring viewer (shown withreference to FIGS. 7A, 7B and 9) may suitably be associated with system100 to enable management to measure facility effectiveness, for example,a plan used in the grinding area where multi-function resources areused. The compliance-monitoring viewer may produce graphs, tables,summaries and the like at individual tool, tool operator, shift, orother levels to enable plan-compliance review, including over asliding-time horizon.

Turning to FIG. 6, illustrated is a conceptual block diagram of anexemplary embodiment of a resource allocator 610 for use in a diffusionprocess 605 in semiconductor wafer fabrication 600. The diffusionprocesses in semiconductor wafer fabrication are well known and, for thepurposes hereof, may again be described as a process of depositing adopant material onto a silicone substrate and diffusing the dopantmaterial into the silicone substrate via thermal agitation.

According to the illustrated embodiment, diffusion process 605 isoperable to execute a plurality of diffusion process plans. Resourceallocator 610 operates to allocate a plurality of multi-functionresources or tools among a plurality of tasks of any given diffusionprocess plan. Resource allocator 610 comprises a monitoring controller620, resource allocation controller 625, a model 630, and a graphicaluser interface 640.

Exemplary monitoring controller 620 monitors measurable characteristicsassociated with an executing diffusion process plan, the multi-functionresources, and the related tasks. Each of the measurable characteristicsis one of a status characteristic or a logistical characteristic.Exemplary model 630 is of diffusion process 605, and representsmathematically the plurality of multi-function resources and theplurality of tasks, as well as defines relationships among related onesthereof as a function of the diffusion process plans.

Exemplary resource allocation controller 625 operates the diffusionprocess model 630 in response to the monitored measurablecharacteristics and allocates certain of the multi-function resourcesamong certain of the tasks to efficiently execute the diffusion processplan. Resource allocation controller 625 is therefore operable to selectand reselect allocated ones of the multi-function resources among onesof the tasks in response to the monitored measurable characteristics.

During the diffusion process, meaning before, during and betweenexecution of various diffusion process plans, resource allocationcontroller 625 operates to modify ones of the mathematicalrepresentations in response to the status or logistical characteristicdata.

The illustrated resource allocator 610 also comprises a data repository,or memory 615, having at least a knowledge database 635. Resourceallocator 610 further operates to modify knowledge database 635 inresponse to changes to or the condition/value of the status andlogistical characteristic data to thereby enable the resource allocatorto be self-learning.

In operation, resource allocator 610 allocates the multi-functionresources among the tasks within diffusion process 605 that executes oneor more diffusion process plans. Initially, and continuously, monitoringcontroller 620 monitors measurable characteristics that are associatedwith an at least one executing diffusion process plan, themulti-function resources, and the tasks. Each of the measurablecharacteristics is either status a characteristic or a logisticalcharacteristic.

The illustrated embodiment delivers compliance-monitoring viewers (shownin FIG. 6 as GUI 640) to enable management to measure diffusion planeffectiveness. Compliance-monitoring viewers produce graphs, tables,summaries and the like at individual tool, tool operator, shift, orother levels to enable plan-compliance review, including over asliding-time horizon.

Model 630 of diffusion process 605 is instantiated to mathematicallyrepresent the multi-function resources and tasks of diffusion process605, and to define relationships among related ones thereof as afunction of the at least one diffusion process plan.

Resource allocation controller 625 operates model 630 in response to themonitored measurable characteristics, and allocates ones of themulti-function resources among ones of the tasks within diffusionprocess 605 to efficiently execute at least one diffusion process plan.

Turning to FIG. 7A, illustrated is an exemplary graphical display ofinformation (generally designated 1000) provided by acompliance-monitoring viewer of the present invention that mayillustratively be associated with resource allocator 110 in asemiconductor wafer fabrication facility.

An exemplary compliance-monitoring viewer is implemented in software andoperates to generate an interface that provides graphical informationthat cooperatively offers enhancements of real-time, visual,intelligent, and control functions, possibly through web-baseconnectivity. Stated differently, a compliance-monitoring viewer is aninterface that is operable to transform real-time process systeminformation into an audio or visual format to enable supervisoryinteraction. Via a compliance-monitoring viewer, management operates tomeasure plan effectiveness, for example, a plan used in the diffusionarea of the present example where multi-function resources have varyingcapabilities and are used to produce wafer products.

An exemplary compliance-monitoring viewer uses a combination bar/linegraph to enable plan-compliance review. An exemplary bar/line graphdemonstrates the compliance to plan over the time period of Jan. 20,2003 to Feb. 20, 2003. Each bar may suitably be shaded, color-coded orthe like based on the percentage of loads (the line) that fall into eachcategory (changed, no plan, planned, “plan<10”, “plan<30” and“plan<60”).

Ideally, diffusion plans are defined well in advance of a load (e.g.,thirty, sixty, one hundred and twenty minutes in advance). In reality,semiconductor-fabrication dynamics cause ever-changing requirements thatoften push the edge of resource capability. Diffusion plans that changeat the “last minute” represent opportunity for improvement in the smoothrunning of a semiconductor-fabrication operation. Actual operationwithout a diffusion plan indicates that desired area-to-areacommunication is compromised (e.g., furnace to wet deck). Further,diffusion plans having relatively short durations, such as, less thanten minutes, represent an opportunity for better work area organizationand communication. By sub-dividing the bars production-line managementmay suitably address the issues over time incrementally.

Turning to FIG. 7B, illustrated is an exemplary graphical display of asubset of information (generally designated 1000) provided by thecompliance-monitoring viewer of the present invention as shown in FIG.7A that may illustratively be associated with resource allocator 110 ina semiconductor wafer fabrication facility.

An exemplary compliance-monitoring viewer displays in FIG. 7B a selectedsubset of days that was related to a first of a plurality of themanufacturing shifts. This level of detail illustratively allows shiftperformance to be managed uniquely by shift-level supervision,including, for instance, when individuals are working additional shiftson normally unscheduled days, or a sliding-time horizon.

In this implementation, an “owning” supervisor may monitor the planningperformance of individuals or automated systems to the original shift.Unexpected events, such as a power outage, may increase “changed plans”as the manufacturing line responds to disruption—conversely,manufacturing “smoothness” or planning correlates to efficient output ofhigh quality product.

Turning to FIG. 8, illustrated is an exemplary display of information(generally designated 1000) provided by an EXCEL spreadsheet that isassociated with compliance-monitoring viewers of the present inventionas shown in FIGS. 7A and 7B. The display 1000 is presented in amodifiable table in EXCEL format wherein the display shows (i) eachinstant in time when a load is initiated (Column C), (ii) a level ofdetail sufficient to allow traceablitity (Column H; a query may producea compliance metric based on the relationship of a diffusion plan atthat time), and (iii) a composite level of detail provided using filtersfor shift assignment (Column G).

Turning to FIG. 9, illustrated is an exemplary resource allocator 110with the compliance-monitoring viewer of FIGS. 7A and 7B, all inaccordance with the principles of the present invention. An exemplarydisplay 1000 of information is provided by the compliance-monitoringviewer, which may be displayed on any type of display device (e.g., GUI140, GUI 640, etc.). The display 1000 comprises a plurality of columnsand a plurality of rows as above discussed.

For purposes of illustration, concurrent reference is made to therespective embodiments disclosed with reference to FIGS. 1, 6, 7A, 7Band 8. It is beneficial to assume that process system 100 isinstantiated and fully operational, and for illustrative purposesdirected to a semiconductor wafer fabrication environment.

An exemplary compliance-monitoring viewer is implemented in software andoperates to generate an interface that provides graphical informationcontrols that cooperatively offer enhancements of real-time, visual,intelligent, and control functions, possibly through web-baseconnectivity. According to one advantageous embodiment hereof, acompliance-monitoring viewer is operable to visualize diffusion plancompliance with data and the status of multifunction resources, servicerequests, as well as on-going transactions by using graphic displays,multimedia equipment, as well as historical and statistical informationwith management (whether human management, automated management, or somecombination of the two) to track and display compliance-monitoring.According to the illustrated embodiment, real-time information ispreferred to updated batch reporting, and when combined with GUI 140interface, operational staff productivity increases significantly.

Through mathematical modeling of multi-function process resources andallocating ones of such resources to perform various tasks within theprocess system, a resource allocator 110 is introduced that allocatessuch resources among a plurality of tasks within process system 100 toexecuting the at least one application process or plan. Resourceallocator 110 comprises a monitoring controller, a model of the processsystem, a resource allocation controller, and an exemplarycompliance-monitoring controller 900 (associated with resource allocator110, though in alternate embodiments, may be associated with the systemin any suitable manner).

Exemplary monitoring controller 130 monitors measurable characteristicsassociated with the executing application process plan, multi-functionresources and related tasks, each of the measurable characteristicsbeing one of a status characteristic and a logistical characteristic.Exemplary model 145 represents mathematically the multi-functionresources and the tasks, and defines relationships among related onesthereof as a function of the application process plan. Exemplaryresource allocation controller 135 operates model 145 in response to themonitored measurable characteristics and allocates ones of themulti-function resources among ones of the tasks within the processsystem to efficiently execute the at least one application process. Anexemplary compliance-monitoring viewer illustratively operates totransform real-time process system information into a multimedia formatto enable supervisory interaction—human management, system management,or some suitable combination of human management and system management.

A compliance-monitoring viewer provides means to measure planeffectiveness. For instance, a plan used in the illustrative diffusionarea where multi-function resources have varying capabilities and areused to produce semiconductor wafers, the compliance-monitoring viewer,and its related methodology, produce graphs, tables, summaries and thelike at individual tool, tool operator, shift, or other levels to enableplan-compliance review, including over a sliding-time horizon.

Although the present invention has been described in detail, thoseskilled in the art should understand that they can make various changes,substitutions and alterations herein without departing from the spiritand scope of the invention in its broadest form.

1. An apparatus, comprising: a model mathematically representing aplurality of resources and a plurality of tasks associated with aprocess system, the model also defining relationships involving theresources and the tasks; a resource allocation controller capable ofusing the model to allocate one or more of the resources among one ormore of the tasks based on one or more measurable characteristicsassociated with the process system, the allocation of the one or moreresources among the one or more tasks supporting execution of at leastone process plan; and a compliance-monitoring viewer capable ofdisplaying process system information to a user, the process systeminformation identifying real-time actual compliance to the at least oneprocess plan during execution of the at least one process plan; whereintasks that have been performed as part of the execution of the at leastone process plan comprise diffusion plans associated with asemiconductor facility, wherein at least some diffusion plans aredefined and then performed, and wherein a time period exists between thedefinition of at least one diffusion plan and the performance of thatdiffusion plan; and wherein the compliance-monitoring viewer isconfigured to provide a bar graph to present at least a portion of theprocess system information to the user, the bar graph comprising aplurality of bars, at least one of the bars subdivided into multiplesections, the sections associated with different lengths of the timeperiods between the definitions of the diffusion plans and theperformance of the diffusion plans.
 2. The apparatus of claim 1, whereinthe compliance-monitoring viewer is associated with a graphical userinterface.
 3. The apparatus of claim 1, wherein thecompliance-monitoring viewer is capable of visualizing the processsystem information over a sliding-time horizon.
 4. The apparatus ofclaim 1, wherein the compliance-monitoring viewer is also capable ofproviding a spreadsheet to present the process system information to theuser.
 5. The apparatus of claim 1, wherein the bars in the bar graph areassociated with different manufacturing shifts.
 6. The apparatus ofclaim 1, wherein the process system information comprises statusinformation associated with the resources, information associated withservice requests, information associated with on-going operations of theresources, historical information, and statistical information.
 7. Theapparatus of claim 1, further comprising: a monitoring controllercapable of monitoring the measurable characteristics associated with theprocess system.
 8. The apparatus of claim 1, wherein thecompliance-monitoring viewer is capable of displaying the process systeminformation to enable measurement of an effectiveness of a planimplemented in the process system.
 9. The apparatus of claim 1, whereinthe process system information identifies the actual compliance to theat least one process plan at a plurality of resolution levels in theprocess system.
 10. The apparatus of claim 9, wherein the plurality ofresolution levels comprises: individual ones of the resources,individual operators of one or more of the resources, and individualmanufacturing shifts.
 11. The apparatus of claim 1, wherein each ofmultiple sections of the bars identifies a percentage of the tasks thatwere planned prior to performance by a specified amount of time, atleast two sections associated with different specified amounts of time.12. The apparatus of claim 11, wherein at least one other section of thebars identifies a percentage of the tasks that were not planned prior toperformance.
 13. The apparatus of claim 12, wherein at least oneadditional section of the bars identifies a percentage of the taskshaving a plan that changed prior to performance.
 14. A method,comprising: storing a model mathematically representing a plurality ofresources and a plurality of tasks associated with a process system, themodel also defining relationships involving the resources and the tasks;using the model to allocate one or more of the resources among one ormore of the tasks based on one or more measurable characteristicsassociated with the process system, the allocation of the one or moreresources among the one or more tasks supporting execution of at leastone process plan; and displaying process system information to a user,the process system information identifying real-time actual complianceto the at least one process plan during execution of the at least oneprocess plan; wherein tasks that have been performed as part of theexecution of the at least one process plan comprise diffusion plansassociated with a semiconductor facility, wherein at least somediffusion plans are defined and then performed, and wherein a timeperiod exists between the definition of at least one diffusion plan andthe performance of that diffusion plan; and wherein displaying theprocess system information comprises providing a bar graph to present atleast a portion of the process system information to the user, the bargraph comprising a plurality of bars, at least one of the barssubdivided into multiple sections, the sections associated withdifferent lengths of the time periods between the definitions of thediffusion plans and the performance of the diffusion plans.
 15. Themethod of claim 14, wherein displaying the process system informationcomprises visualizing the process system information over a sliding-timehorizon.
 16. The method of claim 14, wherein displaying the processsystem information further comprises providing a spreadsheet containingthe process system information.
 17. The method of claim 14, wherein thebars in the bar graph are associated with different manufacturingshifts.
 18. The method of claim 14, wherein the process systeminformation comprises status information associated with the resources,information associated with service requests, information associatedwith on-going operations of the resources, historical information, andstatistical information.
 19. The method of claim 14, further comprising:monitoring the measurable characteristics associated with the processsystem.
 20. The method of claim 14, wherein: each of multiple sectionsof the bars identifies a percentage of the tasks that were planned priorto performance by a specified amount of time, at least two sectionsassociated with different specified amounts of time; at least one othersection of the bars identifies a percentage of the tasks that were notplanned prior to performance; and at least one additional section of thebars identifies a percentage of the tasks having a plan that changedprior to performance.
 21. A process system, comprising: a plurality ofresources; and a resource allocator capable of allocating the resourcesamong a plurality of tasks, the resource allocator comprising: a modelmathematically representing the resources and the tasks, the model alsodefining relationships involving the resources and the tasks; a resourceallocation controller capable of using the model to allocate one or moreof the resources among one or more of the tasks based on one or moremeasurable characteristics associated with the process system, theallocation of the one or more resources among the one or more taskssupporting execution of at least one process plan; and acompliance-monitoring viewer capable of displaying process systeminformation to a user, the process system information identifyingreal-time actual compliance to the at least one process plan duringexecution of the at least one process plan; wherein tasks that have beenperformed as part of the execution of the at least one process plancomprise diffusion plans associated with a semiconductor facility,wherein at least some diffusion plans are defined and then performed,and wherein a time period exists between the definition of at least onediffusion plan and the performance of that diffusion plan; and whereinthe compliance-monitoring viewer is configured to provide a bar graph topresent at least a portion of the process system information to theuser, the bar graph comprising a plurality of bars, at least one of thebars subdivided into multiple sections, the sections associated withdifferent lengths of the time periods between the definitions of thediffusion plans and the performance of the diffusion plans.
 22. Theprocess system of claim 21, wherein the compliance-monitoring viewer iscapable of displaying the process system information subdivided intomanufacturing shifts.
 23. The process system of claim 21, wherein: theprocess system information comprises status information associated withthe resources, information associated with service requests, informationassociated with on-going operations of the resources, historicalinformation, and statistical information.
 24. A computer programembodied on a computer readable medium and capable of being executed bya processor, the computer program comprising computer readable programcode for: monitoring one or more measurable characteristics associatedwith a process system; allocating one or more of a plurality ofresources among one or more of a plurality of tasks using a model, theallocating based on the one or more measurable characteristics, themodel mathematically representing the resources and the tasks, the modelalso defining relationships involving the resources and the tasks, theallocation of the one or more resources among the one or more taskssupporting execution of at least one process plan; and displayingprocess system information to a user to illustrate compliance, theprocess system information identifying real-time actual compliance tothe at least one process plan during execution of the at least oneprocess plan; wherein tasks that have been performed as part of theexecution of the at least one process plan comprise diffusion plansassociated with a semiconductor facility, wherein at least somediffusion plans are defined and then performed, and wherein a timeperiod exists between the definition of at least one diffusion plan andthe performance of that diffusion plan; and wherein displaying theprocess system information comprises providing a bar graph to present atleast a portion of the process system information to the user, the bargraph comprising a plurality of bars, at least one of the barssubdivided into multiple sections, the sections associated withdifferent lengths of the time periods between the definitions of thediffusion plans and the performance of the diffusion plans.